Non-destructive control of critical defects and diagnostics of InGaN/ GaN heterostructures in power LEDs by using their microplasma characteristics

In this work, we studied the controlled microplasma breakdown of InGaN/GaN heterostructures in power light-emitting diodes (LEDs) prepared on various substrates (SiC, AuSn/Si, Al2O3). It was ascert...